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Vertical SAM Microscope for Integrated Circuit Industry



The scanning area is 8-16 times larger than that of the DJ-SAM100 Scanning Acoustic Microscope. Suitable for the detection of medium and large workpieces. Equipped with a set program, few operation steps can greatly improve the detection efficiency. It is suitable for on-site production process control and product inspection in the workshop.


1、The size of the detection area can be adjusted according to the size of the workpiece to be tested;

2、Gantry three-axis sports platform, fully enclosed protection;

3、Universal fixture, one-key calibration, remote assistance, etc.;

4、Automatic water supply and drainage, water circulation filtration system;

5、The detection base plate can be adjusted to adapt to the detection of workpieces of different heights.


Medium and large workpieces — There are important applications in the fields of vacuum brazing of water-cooled heat sinks, carbon fiber composite materials, and large-scale welding components for low-voltage electrical appliances.



2、Maximum Scanning Range: 900mm×600mm×250mm(DJ-SAM200S)、1500mm×1200mm×500mm(DJ-SAM200L);

3、Overall Size:1800×1300×1550(DJ-SAM200S S);3000×4500×2600(DJ-SAM200S L);

4、Detector frequency range:1~50MHz;(Standard,Can be upgraded to 230MHz);

5、Recommended resolution of image:0.5um ~ 4000um;

6、Typical Scanning Time:<60s (Testing Conditions:Scanning area 10mmX10mm,Resolution ratio 50um);

7、Maximum Scanning Speed:500mm/s;Maximum Scanning Acceleration:3m/s²;

8、Motion Mechanism Positional Accuracy:Axis X/Y<±1um,Axis Z <±10um;Repeated Positioning Accuracy:Axis X/Y <±0.02mm,Axis Z <±0.02mm;

9、Sampling frequency:25~250MHz;(Standard,Can be upgraded to 1.5GHz);

10、Adjustable gain per channel:-13~66dB;(Standard,Upgradeable);

11、Pulse Repetition Frequency:5kHz;(Standard,Upgradeable).

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