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DJ-SAM100 Vertical SAM Scanning Acoustic Microscope

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Overview

High detection accuracy, and balanced configuration in scan range, motion performance, overall machine size, etc., suitable for sampling inspection of small and medium-sized parts, failure analysis, process improvement, material qualitative analysis. It is equipped with automatic water supply and drainage, water circulation filtration system, which can be used in workshops or physical and chemical laboratories.


Configuration:

Highly integrated design concept;

Cantilever type three-axis sports table, fully enclosed protection;

Universal fixture, one-key calibration, remote assistance, etc.;

Automatic water supply and drainage, water circulation filtration system;


Applications:

After 6 generations of iterative optimization, the design is mature and meets the general application needs of semiconductors, integrated circuits, IGBT modules, low-voltage electrical appliances, diamond tools and other industries.



Parameter


1、Power:220V/50Hz,2KW;

2、Maximum Scanning Range: 350mm×200mm×110mm;

3、Overall Size: 1350mm × 950mm × 1300mm;

4、Detector frequency range:1~50MHz;(Standard,Can be upgraded to 230MHz);

5、Recommended resolution of image:0.5um ~ 4000um;

6、Typical Scanning Time:<70s (Testing Conditions:Scanning area 10mmX10mm,Resolution ratio 50um);

7、Maximum Scanning Speed: 300mm/s;Maximum Scanning Acceleration:0.8m/s²;

8、Motion Mechanism Positional Accuracy: Axis X/Y: ±1um,Axis Z: ±5um;Repeated Positioning Accuracy:Axis X/Y <±0.01mm,Axis Z <±0.02mm;

9、Adjustable gain per channel:-13~66dB;(Standard,Upgradeable);Pulse Repetition Frequency:5kHz;(Standard,Upgradeable).


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