1. General introduction
As the basic desktop SEM, DJ-SEM60 series can meet the basic experimental needs of most users. It is equipped with SE (secondary electron) detector and BSE (backscattered electron) detector. The load platform can be configured with three axes (X, Y, R). The manual platform can also be upgraded to a five-axis (X, Y, R, Z, T) automatic platform. The EDS spectrum analyzer can be configured in all series of products. The products include the following configurations:
Item | Model | With Detector Option | With Stage Option |
Mini-SEM | DJ-SEM60 | DJ-SEM60S | DJ-SEM60S-MS |
DJ-SEM60D | DJ-SEM60D-MS | ||
DJ-SEM60D-ST |
The model naming rules are as follows:
2. Description
(1) Max Magnification 60,000x
(2) Signal Detection: SE Detector + BSE Detector
(3) Accelerating Voltage:1kV to 30kV,High image resolution
(4) EDS is optional, for component analysis
(5) CCD sample navigation is optional
(6) Tilt stage configuration (0~90°) (optional)
3. Product specifications
Resolution | 15nm (30kV,SE) |
Magnification | 20x~60,000x |
Accelerating Voltage | 1~30kV |
Detector | SE Detector, Optional BSE detector, EDS, etc. |
Electron Gun | Pre-centered tungsten filament cartridge |
Lens system | Focus Lens:2-stage Electromagnetic Condenser Lens |
Stage | 3 axis System, X, Y-axis : 35mm / R-axis: 360° Optional 5-axis sample stage: X:40mm, Y:40mm, Z:40mm, R:360°, T:0~90° |
Image shift | Image shift X, Y Image Shift (±150um) |
Max Sample size | 80mm in diameter, 35mm in height |
Image Scanning system | Fast Scan:320*240 Slow Scan: 640*480 Photo Mode 2:2560*1920 Photo Mode 3:5120*3840 |
Automatic Function | Auto start,Auto focus,Auto Brightness/Contrast |
Image format | BMP, JPEG, PNG, TIFF |
Image Data display | Magnification,Detector type,Accelerating Voltage,Vacuum mode,Logo(Text),Date and time,Text marker,scale bar |
Vacuum system | High vacuum mode, mechanical pump, molecular pump, vacuuming time: within 3 minutes |
Device Volume | 460(W)*600(L)*950(H)mm |
Equipment environment | Temperature:15℃~30℃ , Humidity:70% or less Power source:Single phase 100~240V AC, 1KW, 50/60Hz |
1. General introduction
As the basic desktop SEM, DJ-SEM60 series can meet the basic experimental needs of most users. It is equipped with SE (secondary electron) detector and BSE (backscattered electron) detector. The load platform can be configured with three axes (X, Y, R). The manual platform can also be upgraded to a five-axis (X, Y, R, Z, T) automatic platform. The EDS spectrum analyzer can be configured in all series of products. The products include the following configurations:
Item | Model | With Detector Option | With Stage Option |
Mini-SEM | DJ-SEM60 | DJ-SEM60S | DJ-SEM60S-MS |
DJ-SEM60D | DJ-SEM60D-MS | ||
DJ-SEM60D-ST |
The model naming rules are as follows:
2. Description
(1) Max Magnification 60,000x
(2) Signal Detection: SE Detector + BSE Detector
(3) Accelerating Voltage:1kV to 30kV,High image resolution
(4) EDS is optional, for component analysis
(5) CCD sample navigation is optional
(6) Tilt stage configuration (0~90°) (optional)
3. Product specifications
Resolution | 15nm (30kV,SE) |
Magnification | 20x~60,000x |
Accelerating Voltage | 1~30kV |
Detector | SE Detector, Optional BSE detector, EDS, etc. |
Electron Gun | Pre-centered tungsten filament cartridge |
Lens system | Focus Lens:2-stage Electromagnetic Condenser Lens |
Stage | 3 axis System, X, Y-axis : 35mm / R-axis: 360° Optional 5-axis sample stage: X:40mm, Y:40mm, Z:40mm, R:360°, T:0~90° |
Image shift | Image shift X, Y Image Shift (±150um) |
Max Sample size | 80mm in diameter, 35mm in height |
Image Scanning system | Fast Scan:320*240 Slow Scan: 640*480 Photo Mode 2:2560*1920 Photo Mode 3:5120*3840 |
Automatic Function | Auto start,Auto focus,Auto Brightness/Contrast |
Image format | BMP, JPEG, PNG, TIFF |
Image Data display | Magnification,Detector type,Accelerating Voltage,Vacuum mode,Logo(Text),Date and time,Text marker,scale bar |
Vacuum system | High vacuum mode, mechanical pump, molecular pump, vacuuming time: within 3 minutes |
Device Volume | 460(W)*600(L)*950(H)mm |
Equipment environment | Temperature:15℃~30℃ , Humidity:70% or less Power source:Single phase 100~240V AC, 1KW, 50/60Hz |